Measuring surface topography

The choice of technique is determined by how small details one wants to resolve, and how large area one needs to cover in one image. Different instruments can measure topography and shape over certain length scales laterally and in depth. The table gives the resolution and measurement ranges for the instruments available at SINTEF Materials and Chemistry.

Vertical
resolution
Lateral
resolution

Image width

Instrument
0,1 nm1 nm100 nm - 250 µmAtomic Force Microskope (AFM)
1 nm1 µm120 µm - 10 cmWhite Light Interferometer (WLI)
1-100 µm10-1000 µm1 cm - 1 mStructured light


Contact person: Børge Holme phone: (+47) 98 28 39 46

 


Published January 31, 2005