Micro electro-mechanical systems (MEMS)
Micro electro-mechanical systems (MEMS) comprise a large variety of silicon-based sensors and actuators. The department of Microsystems and Nanotechnology at SINTEF has a long experience in design of mechanical, optical and fluidic microsystems.
A design project often starts with a concept study, in order to choose the most suitable sensing or actuating principle. The design phase is usually followed by FEM simulations, process considerations, and selection of a suitable production facility. Some of the designed devices are manufactured at MiNaLab, others are manufactured in external foundries. We offer flexibility at every level, from initial design to final device production. At MiNaLab, we have long experience with several types of MEMS, roughly divided into four different categories.
