Sputter cluster

High volume piezoelectric thin film production process for microsystems

 aixACCT

First piezoVolume devices

Partners

Logos for all partners

Contact

Project coordinator Frode Tyholdt
SINTEF Materials and Chemistry
P.O.Box 124 Blindern
0314 Oslo, Norway
Phone: +47 91 75 82 74

The research leading to these results has received funding from the European Community's Seventh Framework Programme (FP7/2010-2013) under grant agreement n° 229196